CCL: Monte Carlo Simulations

Dear All,

I am looking for a Monte Carlo Code that can help to predict the 
growth of thin films 
from  a given set of conditions to explain deposition methods
such as CVD, ALD etc.,

I can calculate reaction energies, activation barriers, adsorption energy etc,
from G09, and the best code that i am looking for has to accept these inputs
so that it makes my simulation more reliable.

Any suggestions welcome.

Thanks in advance,